Weesp (The Netherlands), August 27, 2007 – As safety technologies progress, the demand for smaller and less expensive semiconductor acceleration sensors is increasing. As a leading supplier in this product field, DENSO is supplying the world’s smallest automotive semiconductor acceleration sensors for safety systems such as airbag sensing systems, vehicle stability control systems and anti-lock braking systems.
The acceleration sensor has a sensor element composed of fixed and movable electrodes that detect acceleration from a change in capacitance, and a control circuit that converts the change in capacitance to an electric signal. In 2002, DENSO developed a unique stacked structure of the sensor element and the control circuit, achieving the world’s smallest acceleration sensor at that time. Currently this structure is widely used in the industry.
DENSO’s latest semiconductor manufacturing technology for the sensor element enables the movable electrode to be formed on a substrate using only a dry etching process. Usually both dry and wet etching processes are needed. This technology simplifies manufacturing processes and improves production yield, resulting in a lower cost acceleration sensor.
Because it has the world’s thickest fixed and movable electrodes - 15 micrometers - DENSO’s acceleration sensor also provides a wide detection range and high reliability. This thickness is achieved by forming the fixed and movable electrodes on an SOI (silicon on insulator) substrate, which is one of the unique aspects of DENSO’s sensors.
DENSO has continuously improved its semiconductor technologies since the early 1970s, developing a number of groundbreaking products. Now it is working to apply the technologies and expertise cultivated in acceleration sensors to new products, including a yaw-rate sensor for vehicle stability control systems and a laser scanner.
DENSO’s semiconductor products include hybrid and custom integrated circuits installed on electronic control units, and various sensors including acceleration sensors, pressure sensors, cam/crank position sensors, vehicle speed sensors, and solar sensors.
